Production of Y‐Ba‐Cu‐0 Superconducting Thin Films by an Aerosol Chemical Vapor Deposition Process

Abstract

AbstractThin film production by aerosol deposition is a simple, non‐vacuum method, which under certain conditions of the process parameters, can be considered as a chemical vapor deposition (CVD) process. In this paper we describe the formation of superconducting thin films by aerosol deposition in the CVD regime by using metal‐organic precursors. The best results were obtained with the metal β‐diketonates of Y, Ba and Cu dissolved in butylacetate. This solution was nebulized and sprayed on a heated Si‐substrate with a Zr02‐buffer layer at a temperature of 450 C. After deposition a final heat treatment at a temperature of 800 C was applied. The resulting superconducting film has a Tc>2ero of 75 K.