The Influence of Target-Substrate Bias on Pulsed Laser Deposited Yba2Cu307-6

Abstract

AbstractWe have deposited YBa2Cu307.$ thin films onto <100> SrTi03 substrates at 700°C as a function of target‐substrate bias (0 to 300 V) in order to make use of the positive ions in the laser produced plume to assist in the deposition. The films were extensively characterized to determine differences in film properties (composition, structure, and transport). The results suggest that film properties were optimized at or near a target‐substrate bias of 100 V, although, the differences in film properties were within the margin of reproducibility.