Generation of Silicon Nanocolumns by Nanosecond Pulsed-Excimer Laser Irradiation and Their Field Emission Properties

Abstract

ABSTRACTLaser-generated silicon microcone arrays were used as templates for the growth of nanocolumns using laser irradiation as well. The formation mechanism of the microstructure is briefly reviewed, and the origin and growth of nanocolumns are discussed. The formation mechanism of nanocolumns requires highly localized melting, which explains why they fail to form on a flat surface but can grow atop the microcones. Field emission properties from both microcolumns and nanocolumns have been measured. The high aspect ratio (height/tip radius) of nanocolumns makes them suitable for various field emission applications.