High-Gain, High-Speed ZnO MSM Ultraviolet Photodetectors

Abstract

AbstractHigh quality zinc oxide (ZnO) films were epitaxially grown on R-plane sapphire substrates by metalorganic chemical vapor deposition at temperatures in the range 350-600°C. In-situ nitrogen compensation doping was performed using NH3. The metalsemiconductor-metal ultraviolet-sensitive photodetectors were fabricated on nitrogencompensation-doped epitaxial ZnO films. The photoresponsivity of these devices exhibits a linear dependence upon bias voltage up to 10 V, with a photoresponsivity of 400 A/W at 5 V. The rise and fall times are 1 and 1.5 μs, respectively.