Author:
Van Ooij W. J.,Michael R. S.
Abstract
AbstractStatic SIMS was used to characterize polypropylene and polystyrene films following exposure to SF 6 and C2F 6 plasmas. The predominant species which are incorporated into the polymer surfaces are fluorine atoms and CF 2 /CF 3 radicals, respectively.
Publisher
Springer Science and Business Media LLC
Cited by
4 articles.
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