Indium tin oxide thin films prepared by thermal decomposition of ethylene glycol solution

Abstract

Indium tin oxide (ITO) films were prepared on a glass substrate by thermal decomposition of ethylene glycol (EG) solutions which were prepared by dissolving indium and tin chlorides into ethylene glycol and then heating the solution at 200 °C. Homogeneous ITO film with a thickness of 1 μm without any cracks was obtained from the EG solution with a viscosity of about 50 cSt by spin coating, with the rotation of the substrate at 2000 rpm. The crystallization of the film thus obtained occurred above 400 °C. A well-crystallized ITO film was obtained by heat-treating at 600 °C. The resistivity of the ITO film obtained on a glass substrate showed a minimum value of 1.1 × 10−4 ohm cm at about 7 at.% Sn.