Constant Depth DLTS Measurements on Compound Semiconductors

Abstract

ABSTRACTThis paper describes a useful measuring technique enabling Deep Level Transient Spectroscopy [DLTS] on compound semi-conductors. We will report on the methodology of DLTS measurements using newly available software for Miller Feedback Profilers. This method has the advantages of using the constant depth capabilities of the profiler. The combination instrument offers flexibility in limited clean room space.