Molecular Beam Epitaxy of Low Temperature Grown GaAs Photoconductors

Author:

Dykaar D. R.,Eaglesham D. J.,Keil U. D.,Greene B. I.,Saeta P. N.,Pfeiffer L. N.,Kopf R. F.,Darack S. B.,West K. W.

Abstract

ABSTRACTWe report on the characterization of Low Temperature (LT) epitaxial growth of GaAs photoconductors. Samples were characterized using electro-optic sampling, transient femtosecond reflectivity, transmission electron microscopy, and pulsed terahertz spectroscopy as a function of growth temperature, As4 flux, doping and anneal conditions. We find the strongest effect on pulsewidth to be the temperature of an ex-situ rapid thermal anneal. In addition we find evidence of a temperature threshold for As precipitation. For more than an order of magnitude change in As precipitate density we find no corresponding change in electrical pulsewidth. Doping to 1017/cm3 also produces no change in the measured electrical response.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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