Influence of Processing Conditions on Mechanical and Structural Properties of DLC Produced by FIB-CVD Method

Abstract

ABSTRACTInfluence of processing condition on mechanical and structural properties of diamond-like carbon (DLC) by focused ion-beam chemical vapor deposition (FIB-CVD) method was investigated. The DLC specimens were produced under conditions of varying supplied amount of material gas and probe current of FIB. Volume determination results of DLC structures indicated that a deposition rate was increased with both the amount of gas and the probe current. To evaluation of mechanical property, indentation hardness was measured by a nano-indentation tester. From evaluation of mechanical property, it was found that the indentation hardness was sensitive to the processing condition, showing in the range of 8-13 GPa. The hardness of DLC structures was seemed to be lower when etching process higher contributed for formation process. Crystallographic structure of DLC remained amorphous even though the mechanical properties varied widely. Results of hydrogen concentration measurement indicated that increase of hydrogen concentration might lead to decrease of hardness.