Author:
Gust M.C.,Momoda L.A.,Mecartney M.L.
Abstract
ABSTRACTThin films of BaTiO3 were prepared by the sol-gel route using
barium titanium methoxypropoxide in methoxypropanol. Sols with water of
hydrolysis varying between h=0 and h=2 were spun onto (100) Si and Ge coated
(100) Si substrates. XRD and analytical TEM were used to study the
microstructure and crystallization behavior of these films. Polycrystalline
BaTiO3 was obtained by heat treating the films at temperatures
between 600 and 750°C using either conventional furnace annealing or rapid
thermal annealing. Films prepared from sols having the highest water content
tended to crystallize first. The BaTiO3 thin films exhibited a
fine grain size on the order of 25–50 nm. No preferred orientation was
observed. The effects of the hydrolysis conditions of the sol, the type of
heat treatment, and the choice of substrate on the final microstructure of
the films are discussed.
Publisher
Springer Science and Business Media LLC
Cited by
13 articles.
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