Scale-Up of the Nitridation and Sintering of Silicon Preforms Using Microwave Heating

Abstract

AbstractScale-up studies were performed in which microwave heating was used to fabricate reactionbonded silicon nitride and sintered reaction-bonded silicon nitride (SRBSN). Tests were performed in both a 2.45 GHz, 500 liter and a 2.45 GHz, 4000 liter multimode cavities. A variety of sizes, shapes, and compositions of silicon preforms were processed in the studies, including bucket tappets and clevis pins for diesel engines. Up to 230 samples were processed in a single microwave furnace run. Data were collected which included weight gains for nitridation experiments, and final densities for nitridation and sintering experiments. For comparison, nitridation and sintering studies were performed using a conventional resistance-heated furnace.