Thermal Conductivity of Porous Silicon Evaluated from Phase Characteristics of Photoacoustic Spectroscopy

Abstract

ABSTRACTPorous silicon (PS), well known as a visible luminescent material, has been revealed to be an attractive candidate for an ultrasonic emitter recently. Since the ultrasonic emission is based on a thermal process it is important to evaluate thermal properties of PS. We then evaluated the thermal conductivity of PS from the phase delay in a photoacoustic (PA) signal. We report the dependence of thermal conductivity on anodization time in forming PS.