Author:
Elders Job,Spiering Vincent,Walsh Steve
Abstract
Microelectromechanical systems (MEMS), microsystems technology (MST), and micromachines are roughly synonymous terms applied in the United States, Europe, and Japan, respectively, for manufacturing technologies that are enabling miniaturization and the development of useful products.
Publisher
Springer Science and Business Media LLC
Subject
Physical and Theoretical Chemistry,Condensed Matter Physics,General Materials Science
Cited by
23 articles.
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