Author:
Franke Andrea E.,King Tsu-Jae,Howe Roger T.
Abstract
While microelectromechanical systems (MEMS) technology has made a substantial impact over the past decade at the device or component level, it has yet to realize the “S” in its acronym, as complex microsystems consisting of sensors and actuators integrated with sense, control, and signal-processing electronics are still beyond the current state of the art. There are several incentives to co-fabricate MEMS devices and electronics on a single silicon chip, which apply to applications such as inertial sensors.
Publisher
Springer Science and Business Media LLC
Subject
Physical and Theoretical Chemistry,Condensed Matter Physics,General Materials Science
Reference19 articles.
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2. 2 Kung J.T. U.S. Patent No.5,504,026 (April 2, 1996).
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