Author:
Rappoli Brian J.,DeSisto William J.
Abstract
ABSTRACTUV spectroscopy has been used as an in situ diagnostic to measure the gas phase concentration of 2,2,6,6-tetramethyl-3,5-heptanedionate (thd) complexes of Ba, Cu and Y in metalorganic chemical vapor deposition (MOCVD) bubbler effluent. These precursors for MOCVD synthesis of YBa2Cu37−δ (YBCO) show marked instability in gas phase concentration as a function of time during bubbler purge. The UV diagnostic technique has been applied to both a small scale test system and a commercial scale MOCVD reactor.
Publisher
Springer Science and Business Media LLC
Cited by
3 articles.
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