Author:
Appleton B. R.,Beardsley G. M.,Farlow G. C.,Christie W. H.,Ashley P. R.
Abstract
Ion implantation and ion beam mixing have been investigated as alternative techniques to hightemperature diffusion for introducing dopants into LiNbO3. Heavy ion bombardment at both 77 and 300 K initiated a near-surface decomposition causing Li to diffuse to the surface where it formed a nonuniform agglomerate. The damage and annealing characteristics of this effect were studied by ion scattering/channeling, secondary ion mass spectrometry, and optical microscopy. The origins of the surface decomposition are discussed along with possible solutions, and selected samples were evaluated for waveguide properties.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
27 articles.
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1. Crystal structure and optical absorption of Au implanted MgO, SrTiO3 and LiNbO3 crystals;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-05
2. Loss measurements and stoichiometric dependence of Ti and O implanted LiNbO3 waveguides;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-05
3. Application of NRA/channeling to study He+ implanted waveguides;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-09
4. Loss Measurements of Stoichiometric Ti and O Implanted LiNbO3 Waveguides;MRS Proceedings;1995
5. Germanium implantation into substrates for integrated optics;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-04