Power Density Effects in the Physical and Chemical Properties of Sputiered Diamond-Like Carbon thin Films

Abstract

AbstractThin films of diamond-like amorphous carbon were prepared by dc magnetron sputtering. A systematic variation in the physical properties of the films (mass density and electrical resistivity) was found as a function of sputtering power density. Chemical bonding and microstructure of the carbon thin films were investigated using electron energy loss spectroscopy (EELS) and Raman spectroscopy. Films grown at a lower power density were found to have more sp3 -bonded atomic sites and larger graphite microcrystals than films produced at higher sputtering power densities.