New method of photochemical adhesion of fused silica glasses by using Xe2 excimer lamp

Abstract

ABSTRACTA strong adhesion of two silica glasses or a silica glass and a different glass that creates properties of heatproof, no adhesive strain, and high transmittance in the region of ultraviolet [UV] was demonstrated with photochemical reaction by vacuum-ultraviolet [V-UV] light. It was confirmed that the adhesive strength of the silicone oil between the two silica glasses enhanced to 18 [MPa] after irradiation from 0 [MPa] before irradiation, that of the SiO2 and BK7 to 12.3 [MPa], and that of the SiO2 and TEMPAX®, to 10 [MPa], and that of the SiO2 and CLEARCERAM® to 7.4 [MPa]. Furthermore, the adhesive strain of the bonded sample was measured by 3-dimension roughness meter (ZYGO), and the results showed no adhesive strain. This sample had the bonding strength at 500 degrees Celsius.