Author:
Smith D. A.,Townsend S. J.,Nichols C. S.
Abstract
ABSTRACTGrain growth occurs during the deposition and subsequent processing of metallic films. Observation of the grain structure by scanning ion probe microscopy and grain growth by in situ transmission electron microscopy using a heating stage serves to define some characteristic grain structures and their evolution in pure metal and alloy films used for metallisation.
Publisher
Springer Science and Business Media LLC
Reference7 articles.
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