The deposition of α–Fe2O3 by aerosol chemical vapor deposition

Abstract

α-Fe2O3 thin films have been deposited on Si(111) substrates at high temperatures (600–800 °C) by the spray pyrolysis method. Four different iron(III) β-diketonates have been used as precursors in order to obtain polycrystalline films of good adherence, which have been characterized by x-ray diffraction, scanning electron microscopy, and magnetic measurements.