Application of Elastic Mid-IR-Laser-Light Scattering for Non-Destructive Inspection in Microelectronics

Abstract

AbstractSome possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materials and structures are discussed in the paper. The conclusion is made that the techniques in question might be very useful for solving a large number of problems regarding defect investigations and quality monitoring both in research laboratories and the industry of microelectronics.