Mechanical Properties of Al Thin Films as Measured by Bulge Testing

Abstract

AbstractFree-standing rectangular Al thin films have been fabricated using sputter deposition and standard micromachining techniques. Mechanical properties and residual stresses of both asdeposited and annealed Al films were measured by bulge testing. The films were loaded into the plastic deformation regime, and then unloaded and reloaded several times. The pressure and deflection of the thin films were recorded and used to generate stress-strain curves. The planestrain elastic modulus, flow stress and plastic behavior of the Al thin films were used to characterize the mechanical response of these films. The Al films were measured to have a plane-strain modulus that is slightly lower than the literature values for a {111} textured film. The Von-Mises equivalent yield stress was measured to be higher in the annealed films but much more significant strain hardening was observed in the as-deposited films. A plastic hysteresis was observed on unloading and reloading stress-strain curves of the as-deposited Al films but not the annealed films.