Influence of Surface Relaxation on X-Ray Topographic Imaging of Interfacial Dislocations in Heterosystems.

Abstract

ABSTRACTThe influence of surface relaxation on the imaging of dislocations in thin single crystal films, using white beam synchrotron radiation topography in grazing Bragg-Laue geometry, has been assessed. The predicted visibility of dislocation images on grazing Bragg- Laue topographs, for the particular case of interfacial edge dislocations in a GaAs/Si heterostructure, is shown to be strongly influenced. Agreement between predicted and observed visibility could only be obtained by incorporating the surface relaxation effects, which thus strongly influence the depth sensitivity of the technique, i.e. the ability to pinpoint the depth of a dislocation. Dislocation image widths are also influenced by these effects.