Abstract
ABSTRACTThe interaction of a cw argon-ion laser with the materials used in the microelectronics technology is described as a pyrolytic effect. A chemical reaction is induced between the oxide layer and the hot irradiated silicon or aluminum line. By making a cross section of the irradiated area using a focused ion beam, the formation of an unstable insulating material covering the conducting material is observed.
Publisher
Springer Science and Business Media LLC