Author:
Stognij A.I.,Tokarev V.V.,Mitin Yu.N.
Abstract
AbstractThe paper presents the results of AES, SIMS, RBS and electron microscopy investigation of compound metal oxide films. The films were deposited by sputtering compound targets with oxygen ion beam, extracted from hollow cold cathode ion source.
Publisher
Springer Science and Business Media LLC
Cited by
8 articles.
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