Author:
Hails J.E.,Irvine S.J.C.,Mullin J.B.
Abstract
ABSTRACTBefore an organometallic compound can be used as an MOVPE precursor, certain basic properties need to be known and one of the most important of these is vapour pressure. A technique for the measurement of vapour pressures using an MOVPE system designed for precursor assessment is described. Results on the assessment of di-is-propyl-telluride, di-n-propyl-telluride, di-allyl-telluride, methyl-allyl-telluride and di-t-butyl-telluride are presented.
Publisher
Springer Science and Business Media LLC
Cited by
6 articles.
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