Author:
Chen J. M.,Reed B. W.,Chen J. M.,Reed B. W.,MacDonald N. C.
Abstract
AbstractWe present a MEMS microinstrument to interface submicron-scale structures and study their properties. Using this microinstrument integrated with a 150nm diameter silicon fiber that has high fracture strength and a high force micro-actuator, the non-linearity of n-type silicon's piezoresistive effect is measured up to the third order, using data from the high strain range of 0-1% for the first time.
Publisher
Springer Science and Business Media LLC
Reference11 articles.
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