Single & Multiple Pulse Ablation of Polymeric and High Density Materials with Excimer Laser Radiation at 193NM and 248NM

Abstract

ABSTRACTThe evolution of the excimer laser from a research tool in the 1970's to the industrial models of the 1980's has opened up numerous applications in semiconductor manufacturing, materials processing, and biological and medical research. Present production-capable, computercontrolled excimer systems with handling equipment enabling efficient automation can now operate for up to 50 million shots before undergoing scheduled maintenance, with fluences remaining within ±10% in most cases. Thus, although many uses for the excimer laser are still researchoriented, production applications are rapidly emerging.