Single & Multiple Pulse Ablation of Polymeric and High Density Materials with Excimer Laser Radiation at 193NM and 248NM

Author:

Elliott David J.,Piwczyk Ernhard P.,Elliott David J.,Piwczyk Bernhard P.

Abstract

ABSTRACTThe evolution of the excimer laser from a research tool in the 1970's to the industrial models of the 1980's has opened up numerous applications in semiconductor manufacturing, materials processing, and biological and medical research. Present production-capable, computercontrolled excimer systems with handling equipment enabling efficient automation can now operate for up to 50 million shots before undergoing scheduled maintenance, with fluences remaining within ±10% in most cases. Thus, although many uses for the excimer laser are still researchoriented, production applications are rapidly emerging.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference6 articles.

1. 5. Ehrlich D.J. , EARLY APPLICATIONS OF LASER DIRECT PATTERNING: DIRECT WRITING AND EXCIMER PROJECTION, Solid State Technology, December, 1985.

2. ABLATIVE PHOTODECOMPOSITION OF POLYMER FILMS BY PULSED FARULTRAVIOLET (193NM) LASER RADIATION: DEPENDENCE OF ETCH DEPTH ON EXPERIMENTAL CONDITIONS;Srinivasan;Journal of Polymer Science: Polymer Chemistry Edition,1984

3. Laser ablation of organic polymers: Microscopic models for photochemical and thermal processes

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