Atomic-Scale Modeling of Low-Energy Ion-Solid Processes

Abstract

ABSTRACTVarious techniques which have been applied to modeling low-energy (≪ 1 keV) ion-solid interactions on an atomistic scale are described. In addition to their individual strengths, all such methods also have a number of drawbacks, both fundamental and practical. The range of validity, and the problems encountered external to this range, will be outlined for the different approaches. Finally, examples of molecular dynamics simulations of low-energy ion-solid interactions will be presented.