Effect of Mode-Mixity and Porosity on Interfacial Fracture of Low-k Dielectrics

Author:

Merrill Caroline C.,Ho Paul S.

Abstract

AbstractIn this study, we developed a system allowing interfacial adhesion measurements as a function of mode-mixity, from pure tension to pure shear. Results show that the debonding energy increases, by a factor of 3 to 10, as the amount of shear stress increases, approaching mode II conditions. For low k dielectrics, the debonding energy was found to decrease with increasing porosity and increase with increasing plasticity. The crack propagation is also dependent on mode-mixity.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference5 articles.

1. A Test Specimen for Determining the Fracture Resistance of Bimaterial Interfaces

2. Mixed-mode fracture characterization of adhesive joints

3. Thermal conductivity study of porous low-k dielectric materials

4. 3. Ho P.S. , Miller M.R. , “Interfacial Adhesion Study for Low-k Interconnects in Flip-chip Packages”, Electronic Components and Technology Conference (2000) 1089–1094

5. 5. Merrill C.C. , “Effects of Mode-Mixity and Porosity on Interfacial Adhesion of Porous Low-k Materials”, Master's thesis, SRC website

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