Author:
Wyrsch Nicolas,Powolny François,Despeisse Matthieu,Dunand Sylvain,Jarron Pierre,Ballif Christophe
Abstract
AbstractA new type of micro-channel plate detector based on hydrogenated amorphous silicon is proposed which overcomes the fabrication and performance issues of glass or bulk silicon ones. This new type of detectors consists in 80-100 μm thick layers of amorphous silicon which are micro-machined by deep reactive ion etching to form the channels. This paper focuses on the structure and fabrication process and presents first results obtained with test devices on electron detection which demonstrate amplification effects. Fabrication and performance issues are also discussed.
Publisher
Springer Science and Business Media LLC
Cited by
5 articles.
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1. New Developments in Amorphous Silicon-Based Microchannel Plates;IEEE Transactions on Nuclear Science;2023-09
2. Gain regulation of the microchannel plate system;International Journal of Mass Spectrometry;2017-10
3. Review of amorphous silicon based particle detectors: the quest for single particle detection;Semiconductor Science and Technology;2016-09-19
4. Amorphous silicon-based microchannel plates;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2012-12
5. Amorphous Silicon Based Particle Detectors;MRS Proceedings;2011