Author:
Cooper Elizabeth A.,Nastasi Michael,Sickafus Kurt E.
Abstract
ABSTRACTThin films made with a thin embedded marker layer of iron or iron oxide in amorphous alumina were ion mixed with 210 keV Ar over a temperature range of RT to 750°C in vacuum. The dose range was 5×l015-7×l016ions/cm2with an average dose rate of 4.5×1012ions/cm2-sec. The resulting marker distributions were analyzed using RBS. Spreading of the iron RBS peak due to mixing into the alumina matrix was observed in the Fe2O3marker samples and was clearly seen to be a function of temperature (>400°C) and dose, whereas for the Fe marker sample, no such temperature dependence was observed. An activation energy for the thermally assisted ion mixing in the Fe2O3marker sample was determined to be 0.69 eV in comparison to an activation energy of 1.77 eV for samples that underwent only a thermal treatment.
Publisher
Springer Science and Business Media LLC
Cited by
5 articles.
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