A Large Area, High-Resolution a-Si:H Array for X-Ray Imaging

Author:

Antonuk L.E.,El-Mohri Y.,Huang W.,Siewerdsen J.,Yorkston J.,Street R.A.

Abstract

ABSTRACTThe development of a large area, high-resolution, a-Si:H x-ray imager is reported. The array has 1536×1920 pixels, a pixel pitch of 127μm, and an area of 19.5×24.4 cm2. Tne array is tailored to the high frame rate and high spatial resolution requirements of diagnostic x-ray imaging. The design of this array is presented and examples of x-ray images are illustrated. Initial Measurements of the sensor capacitance and pixel time constant properties are in good agreement with theoretical expectations. These results indicate that high-resolution arrays of this construction are capable of providing fluoroscopic images at rates of at least 30 frames per second.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference5 articles.

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1. Two-dimensional a-Si:H n-i-p photodiode array for low-level light detection;IEEE Journal of Quantum Electronics;2005-05

2. Two-dimensional sensor array for low-level light detection;Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education;2004-12-09

3. a-Si:H TFT-Based Active Matrix Flat-Panel Imagers For Medical X-Ray Applications;Thin Film Transistors;2004

4. Multilayer Color Detectors;Technology and Applications of Amorphous Silicon;2000

5. Amorphous silicon switching device for high-resolution two-color photodetector matrix;Sensors and Actuators A: Physical;1999-12

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