Minimization of Non-Uniform Ion-Thinning Effects in Thin Film Transverse Specimens for Transmission Electron Microscopy

Abstract

AbstractA computer-controlled, specimen rotation attachment was developed and installed on a commercial ion-milling system for TEM specimen preparation. This rotation method produced relatively large thin areas on a variety of thin film transverse specimens with a difference in the ion-milling rates between the film and the substrate. The results were generally comparable to those obtained by a newly developed low-angle ion-thinning procedure and the overall processing time was considerably shortened.