Threshold for Single Excimer Laser Pulse Backside Removal of Thin Metal Films from Optical Quartz

Author:

Baseman R. J.,Andreshak J. C.

Abstract

ABSTRACTThe minimum energy in a 248 nm, 25 ns long excimer laser pulse required to remove thin Au and Cr films from optical quartz has been measured. Heating of the films by the laser has been modelled with a finite element calculation. Assuming that at threshold, all of the laser energy contributes to film removal, the calculations show that the gold films are removed when the heated gold surface reaches the atmospheric boiling point, and that temperatures well in excess of the atmospheric boiling point are required to remove the Cr films, with the required temperatures increasing with film thickness.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference11 articles.

1. 11) Gupta A. , Alcorn R. , Andreshak J.C. , unpublished results.

2. Low energy neutral beam production by laser vaporization of metals

3. 4). Baseman R.J. , Gupta A. , Sausa R.C. , Progler C. , Symp B, Fall 1987 MRS Meeting, Boston, MA.

4. Measurement of Electron Densities and Temperatures in the Plasma Boundary Combining Neutral Beam Probes and Laser-Induced Fluorescence

5. Laser‐generated pulsed atomic beams

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Fundamentals and Advances in Laser-Induced Transfer;Optics & Laser Technology;2023-05

2. Laser-Induced Forward Transfer of Metals;Laser Printing of Functional Materials;2018-01-05

3. Pulsed Excimer Laser Photoablation by Backside Irradiation of Thin Metal Coated Polymer Films;MRS Proceedings;1993

4. Laser-induced forward transfer of aluminium;Applied Surface Science;1991-12

5. Blow-off of aluminium films;Applied Physics A Solids and Surfaces;1991-09

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3