Application of CuBr Ion Conductor Thin-Films for Ammonia Gas Detection

Abstract

ABSTRACTCuBr films are used to design an ammonia gas microsensor operating at ambient temperature, with high sensitivity and much improved selectivity in comparison with usual conductometric microsensors. The specific detection mechanism relies on adsorption of ammonia molecules and interactions with mobile Cu+ ions in the ionic conductor film. The CuBr films can be prepared by r.f. sputtering, but more simply and cost efficiently by chemical reaction of copper metal with bromine ions. Photolithographic techniques are applied to miniaturize the sensor.