Hydrogen-Plasma Reactive Flushing for a-Si:H P-I-N Solar Cell Fabrication-Reference-Cited by-同舟云学术

Hydrogen-Plasma Reactive Flushing for a-Si:H P-I-N Solar Cell Fabrication

Published:1989 Issue: Volume:149 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Tsuo Y. S.,Xu Y.,Crandall Richard S.,Ullal H. S.,Emery K.

Abstract

ABSTRACTWe have studied the effects of a hydrogen-plasma reactive flush between the pand i-layer depositions in fabricating solar cells of glass/TCO/p(a-SiC:H)-i(a-Si:H)-n(a-Si:H)/metal in a single-chamber, glow-discharge deposition system. Spectral response, photoluminescence, and photovoltaic conversion efficiency measurements show that the hydrogen-plasma reactive flush is effective in reducing the p-i interface recombination of charge carriers and in improving solar cell performance.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference10 articles.

1. 7. Deng X.J. , Tsuo Y.S. , and Trefny J.U. in Proceedings of the Industrial-University Advanced Materials Conference, March 6–9, 1989, Denver, Colorado, to be published.

2. 1. Rajeswaran G. , Vanier P.E. , Corderman R.R. , and Kampas F.J. in Proceedings of the 18th IEEE Photovoltaics Specialists Conference (IEEE, 1985) pp. 1271–1276.

3. 8. Tsuo Y.S. , Weil R. , Asher S. , Nelson A. , Xu Y. , and Tsu R. in Proceedings of the 19th IEEE Photovoltaics Specialists Conference (IEEE, 1987) pp. 705–708.

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