Microwave Nitrudation of Silicon Compacts Utilizing a Temperature Gradient

Abstract

ABSTRACTSilicon compacts nitrided utilizing the temperature gradient inherent to microwave heating were more fully converted to silicon nitride than was possible with similar compacts nitrided isothermally. Although nitrogen depletion prevented the reaction rate in the center from exceeding that at the surface, the temperature gradient partially counteracted the effect of nitrogen depletion. Thus the microwave-heated specimens could be nitrided fully before the reduction in porosity that accompanies the reaction eliminated the diffusion of nitrogen into the compact.