Some Applications of SIMS and SSMS in Materials Characterization

Abstract

ABSTRACTSome applications of spark source mass spectrometry are given showing that this technique, often considered as suitable for bulk analysis only, can also be used for the determination of impurities in thin layers and for in-depth profiling in rather thick samples.Secondary ion mass spectrometry, in addition to its applications in surface- and in-depth analysis, can successfully be applied to quantitative analysis when using the matrix ion species ratio as an environment sensitive indicator, or when using the isotope dilution method.