Author:
Hewett G A.,Bohlin K. E.,Randoplh M. W.,Lau S. S.
Abstract
ABSTRACTWe have investigated silicon oxide formation on co-deposited Au-Si alloy films at low temperatures. Alloy compositions spanning the Au-Si binary phase diagram have been examined. It was found that alloys with compositions above 40 at. % Au were most efficient in promoting oxide formation. These results are compared with the Au on Si sample configuration where Si is transported through the Au before oxidizing. The possibility of using alloys to form Au lines with a self passivating oxide coating after patterning and oxidation is discussed.
Publisher
Springer Science and Business Media LLC
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