Author:
Nogar N. S.,Keaton G. L.,Anderson J. E.,Trkula M.
Abstract
AbstractEmission spectroscopy and laser-induced fluorescence have been used to monitor the field and tail-flame regions of a Hull-design1inductively coupled plasma. This plasma is used for a variety of syntheses2,3including SiC, TiC, BN, AlN and diamond. Temporallyand spatially-resolved spectra of both pure Ar and Ar/gas mixtures have been studied as a function of RF power, pressure and flow rate. Preliminary data suggest that the system is far from local thermodynamic equilibrium.
Publisher
Springer Science and Business Media LLC