PbZr0.53Ti0.47O3 (PZT) Thin Films on La0.5Sr0.5CoO3 (LSCO) Bottom Electrodes Prepared by Chemical Solution Deposition and Annealed at Different Temperatures

Abstract

ABSTRACTPbZr0.53Ti0.47O3 (PZT) films on La0.5Sr0.5CoO3 (LSCO) /Pt electrodes crystallize in the perovskite phase at 550°C. Cross section SEM shows a columnar grain structure of PZT films on fine-grained LSCO. The ferroelectric response of the heterostructures depends on the annealing temperature of the LSCO layer. The remanent polarization and coercive field of the PZT annealed at 550 °C deposited on LSCO annealed at 800 °C are 25 μC/cm2 and 99 kV/cm respectively, comparable to the values obtained for PZT films on platinized silicon substrate.