Author:
Ray Curtis A.,Sloan Charles L.,Johnson A. David,Busch John D.,Petty Bruce R.
Abstract
ABSTRACTA new actuator for silicon micro-valves has been developed and tested. A thin film shape memory alloy provides for large deflections with high speed, low power, and small size. The actuator is batch fabricated with planar processes.
Publisher
Springer Science and Business Media LLC
Reference7 articles.
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