Direct-Writing of Three-Dimensional Structures Using Laser-Based Processes

Abstract

AbstractThree-dimensional structures of selected materials can be written directly to the precise locations required using laser exposure of suitable gaseous precursor mixtures. Writing speeds exceeding 50 μm/s can be achieved. Examples presented in this work include the creation of a tiny time-of-flight laser ionization mass spectrometer, laserdriven movable micro-objects, and an ac electric-field microcage for storage, handling, and transferring small neutral objects in aqueous solution. The impact for lasercontrolled site-selective growth of carbon nanotube cables is demonstrated.