Plasticity Length Scale in LIGA Nickel MEMS Structures

Abstract

AbstractThe plasticity length scale parameters associated with rotational and stretch gradients in LIGA nickel MEMS structures plated from sulfamate bath are presented in this paper. These are obtained from micro-bend and micro-tensile experiments on LIGA nickel films with different thicknesses. The composite length-scale parameter, lc is measured to be ∼ 4.8 νm for as-plated films (25, 50, 100 and 175 νm thick). The implications of the results are then discussed for the modeling of plasticity in LIGA nickel structures.