Processing and Characterization of High Porosity Aerogel Films

Author:

Hrubesh Lawrence W.,Poco John F.

Abstract

AbstractAerogels are highly porous solids having unique morphology among materials because both the pores and particles making up the material have sizes less than wavelengths of visible light. Such a unique morphology modifies the normal molecular transport mechanisms within the material, resulting in exceptional thermal, acoustical, mechanical, and electrical properties. For example, aerogels have the lowest measured thermal conductivity and dielectric constant for any solid material. Special methods are required to make aerogel films with high porosity. In this paper, we discuss the special conditions needed to fabricate aerogel films having porosities greater than 75% and we describe methods of processing inorganic aerogel films having controllable thicknesses in the range 0.5 to 200 micrometers. We report methods and results of characterizing the films including thickness, refractive index, density (porosity), and dielectric constant. We also discuss results of metallization and patterning on the aerogel films for applications involving microminiature electronics and thermal detectors.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Pore sealing of mesoporous silica low-k dielectrics by oxygen and argon plasma treatments;Microelectronic Engineering;2009-11

2. Aerogels;Ullmann's Encyclopedia of Industrial Chemistry;2006-12-15

3. Porous silica materials as low-k dielectrics for electronic and optical interconnects;Thin Solid Films;2001-11

4. Low-k materials for microelectronics interconnects;Handbook of Advanced Electronic and Photonic Materials and Devices;2001

5. Aerogels;Ullmann's Encyclopedia of Industrial Chemistry;2000-06-15

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