Author:
Weiller B. H.,Barrie J. D.,Aitchison K. A.,Chaffee P. D.
Abstract
AbstractWe have been investigating several chemical microsensor technologies for the detection of chemicals found in propellant and rocket exhaust plumes and as contaminants for satellite components. In this work we have developed a catalytic metal sensor for the detection of H2 contamination in electronic device packages. The sensor is based on the resistance of a thin film Pd/Ni alloy. Data have been obtained on its response at room temperature to various levels of H2 as well as the effects of H2O and O2 on its performance. Hydrogen levels to 10.5 ppm have been detected and the responsivity is about twice that of similar sensors. The sensor is insensitive to H2O but its response to H2 is strongly inhibited by O2.
Publisher
Springer Science and Business Media LLC
Reference10 articles.
1. 10) Hughes R. C. , Moreno D. J. , Jenkins M. W. , and Rodriquez J. L. , Solid-State Sensors and Actuators Workshop, 13- 16 June 1994, Hilton Head SC; report #SAND-94-0047C.
2. 7) Camp W. O. , Lasater R. , Genova V. , and Hume R. , IEEE GaAs IC Symposium p. 203 (1989).
3. Thin films of Pd/Ni alloys for detection of high hydrogen concentrations
4. A 200 MHz surface acoustic wave resonator mass microbalance
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献