The effect of substrate roughness on the properties of RF sputtered AZO thin film
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science
Link
http://link.springer.com/content/pdf/10.1557/mrc.2019.66.pdf
Reference12 articles.
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4. T. Minami, T. Miyata, R. Uozaki, H. Sai, and T Koida: Textured surface structures formed using new techniques on transparent conducting Al-doped zinc oxide films prepared by magnetron sputtering. Thin Solid Films 614, 56–61 (2016).
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