Raman Spectroscopy for Semiconductor Thin Film Analysis

Abstract

AbstractThe application of Raman spectroscopy to various semiconductor thin film, interface and surface problems will be presented. Specific focus will be on the vibrational excitations of the materials systems which are probed by the Raman measurements. Experimental configurations are described which are optimized for general thin film analysis, microprobe analysis, and in situ UHV surface/interface analysis. The vibrational properties can be used for phase and composition identification, crystal/amorphous structure, strain, impurity configurations, and superlattice properties. Specific examples will include thermal processing of CVD Si films, microprobe of laser annealed films, MOCVD AlxGa1−xAs films, silicide formation and identification, amorphous superlattices, and hydrogen impurities in crystalline Si.