Author:
Buchal Ch.,Ashley P. R.,Appleton B. R.
Abstract
A new technique for successfully fabricating high-quality optical waveguides in LiNbO3 is reported. A high concentration of Ti is implanted with the substrate at liquid nitrogen temperature and an amorphous, Ti-rich, nonequilibrium phase is produced in the implanted, near-surface region. Subsequent thermal annealing in water-saturated oxygen atmosphere at up to 1000°C initiates solid-phase epitaxial regrowth onto the crystalline substrate. A highquality single crystalline layer results that is rich in Ti and has excellent waveguiding properties.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
59 articles.
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